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Density and spatial distribution of MERIE-like plasma induced defects in SiO2

โœ Scribed by Paskaleva, A. ;Novkovski, N. ;Atanassova, E. ;Pecovska-Gjorgjevich, M.


Publisher
John Wiley and Sons
Year
2003
Tongue
English
Weight
210 KB
Volume
199
Category
Article
ISSN
0031-8965

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