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Densification and noble gas retention of ion-implanted porous silicon

✍ Scribed by F. Pászti; A. Manuaba; E. Szilágyi; É. Vázsonyi; Z. Vértesy


Book ID
113287968
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
693 KB
Volume
117
Category
Article
ISSN
0168-583X

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