✦ LIBER ✦

Degradation of high-K LA2O3 gate dielectrics using progressive electrical stress

✍ Scribed by E. Miranda; J. Molina; Y. Kim; H. Iwai

Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 368 KB
Volume: 45
Category: Article
ISSN: 0026-2714
DOI: 10.1016/j.microrel.2005.07.022

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Structural properties and electrical cha

Structural properties and electrical characteristics of high-k Dy2O3 gate dielectrics

✍ Tung-Ming Pan; Wei-Tsung Chang; Fu-Chien Chiu 📂 Article 📅 2011 🏛 Elsevier Science 🌐 English ⚖ 717 KB

Physical and electrical characteristics

Physical and electrical characteristics of a high-k Yb2O3 gate dielectric

✍ Tung-Ming Pan; Wei-Shiang Huang 📂 Article 📅 2009 🏛 Elsevier Science 🌐 English ⚖ 630 KB

Schottky barrier SOI-MOSFETs with high-k

Schottky barrier SOI-MOSFETs with high-k La2O3/ZrO2 gate dielectrics

✍ C. Henkel; S. Abermann; O. Bethge; G. Pozzovivo; P. Klang; M. Stöger-Pollach; E. 📂 Article 📅 2011 🏛 Elsevier Science 🌐 English ⚖ 725 KB

Schottky barrier SOI-MOSFETs incorporating a La(2)O(3)/ZrO(2) high-k dielectric stack deposited by atomic layer deposition are investigated. As the La precursor tris(N,N'-diisopropylformamidinato) lanthanum is used. As a mid-gap metal gate electrode TiN capped with W is applied. Processing parameter

Structural properties and electrical cha

Structural properties and electrical characteristics of high-k Tm2Ti2O7 gate dielectrics

✍ Tung-Ming Pan; Li-Chen Yen 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 826 KB

Electrical characterization of high-k ga

Electrical characterization of high-k gate dielectrics on semiconductors

✍ T.P. Ma 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 531 KB

Electrical characteristics of polycrysta

Electrical characteristics of polycrystalline Si layers embedded into high-k Al2O3 gate layers

✍ Byoungjun Park; Kyoungah Cho; Sangsig Kim 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 359 KB