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Defects and stresses in MBE-grown GaN and Al0.3Ga0.7N layers doped by silicon using silane

✍ Scribed by Ratnikov, V. V.; Kyutt, R. N.; Smirnov, A. N.; Davydov, V. Yu.; Shcheglov, M. P.; Malin, T. V.; Zhuravlev, K. S.


Book ID
121584116
Publisher
SP MAIK Nauka/Interperiodica
Year
2013
Tongue
English
Weight
214 KB
Volume
58
Category
Article
ISSN
1063-7745

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## Abstract The electron transport properties in Al~0.25~Ga~0.75~N/AlN/GaN/In~__x__~Ga~1βˆ’__x__~N/GaN double heterostructures with various indium compositions and GaN channel thicknesses were investigated. Samples were grown on __c__‐plane sapphire substrates by MOCVD and evaluated using variable te