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Defects and diffusion in high purity silicon for detector applications

✍ Scribed by B. G. Svensson; E.V. Monakhov; G. Alfieri; M. Mikelsen; B. S. Avset; A. Hallén


Book ID
104556585
Publisher
John Wiley and Sons
Year
2004
Tongue
English
Weight
183 KB
Volume
1
Category
Article
ISSN
1862-6351

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Defect Control in High Purity Metals for
✍ Gilman, P. S. 📂 Article 📅 1998 🏛 John Wiley and Sons 🌐 English ⚖ 458 KB

Metal purity for interconnect applications deposited by physical vapor deposition has steadily improved ot the point where 5N5 purity for aluminum alloys is routinely exceeded, while for titanium metal purity is at 5N and progressing to 6N. However, recent industrial experience indicates that metal