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Defect levels in n-silicon after high energy and high dose implantation of proton

✍ Scribed by J.F. Barbot; C. Blanchard; E. Ntsoenzok; J. Vernois

Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
297 KB
Volume
36
Category
Article
ISSN
0921-5107

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To advance the understanding of fundamental physical and chemical processes occurring in ion bombardment of metals, ion beam nitridation of aluminium, iron, copper and gold is studied in the energy range 2-5 keV, at current densities of 1 and 5 lA cm-2, for each ion energy. The concentration proÐles