RBS and ERDA determinations of depth distributions of high-dose carbon ions implanted in silicon for silicon–carbide synthesis study

✍ Scribed by S. Intarasiri; T. Kamwanna; A. Hallén; L.D. Yu; M.S. Janson; C. Thongleum; G. Possnert; S. Singkarat

• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 449 KB
• Volume: 249
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2006.03.182