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Defect density of a-Si:H films grown at high deposition rates

✍ Scribed by B. Alhallani; G. Suchaneck; J. Schmal; R. Staub; B. Adolphi; K. Drescher

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

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✍ S.K. Soni; Anup Phatak; R.O. Dusane 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 268 KB