Defect Density of a-Si: H(B) Prepared at High Deposition Rate with Triethylboron

✍ Scribed by Schmal, J. ;Kluge, G. ;Kottwitz, A. ;Bindemann, R. ;Schade, K.

• Publisher: John Wiley and Sons
• Year: 1992
• Tongue: English
• Weight: 717 KB
• Volume: 134
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/pssa.2211340115