✦ LIBER ✦

Deep UV photolithographic systems and processes

✍ Scribed by C. W. Wilkins Jr.; E. Reichmanis; E. A. Chandross; R. L. Hartless

Book ID: 104520348
Publisher: Society for Plastic Engineers
Year: 1983
Tongue: English
Weight: 332 KB
Volume: 23
Category: Article
ISSN: 0032-3888
DOI: 10.1002/pen.760231810

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Excimer lasers as deep UV sources for ph

Excimer lasers as deep UV sources for photolithographic system

✍ F Goodall; RA Lawes; PH Sharp 📂 Article 📅 1986 🏛 Elsevier Science 🌐 English ⚖ 1023 KB

Chemistry and processes for deep-UV resi

Chemistry and processes for deep-UV resists

✍ E. Reichmanis; L.F. Thompson 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 539 KB

UV-Sensitive polyarylates as photolithog

UV-Sensitive polyarylates as photolithographic emulsions

✍ Konrad Noniewicz; Zbigniew K. Brzozowski; Irmina Zadrozna 📂 Article 📅 1996 🏛 John Wiley and Sons 🌐 English ⚖ 845 KB

Several UV-sensitive polyarylates based on bisbenzylidenoketones for use as potential photolithographic emulsions were obtained by interfacial polycondensation. The structures of obtained UV-sensitive monomers and polymers were confirmed by infrared, 'H-NMR, and UV spectroscopies. Mechanical and die

Chemistry and process for deep-UV resist

Chemistry and process for deep-UV resists

✍ E. Reichmanis; L.F. Thompson 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 577 KB

PRIME process for deep UV and E-beam lit

PRIME process for deep UV and E-beam lithography

✍ C. Pierrat; S. Tedesco; F. Vinet; T. Mourier; M. Lerme; B. Dal'Zotto; J.C. Guibe 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 813 KB

Novel polymer systems for deep UV microl

Novel polymer systems for deep UV microlens arrays

✍ Mackintosh, A R; Kuehne, A J C; Pethrick, R A; Guilhabert, B; Gu, E; Lee, C L; D 📂 Article 📅 2008 🏛 Institute of Physics 🌐 English ⚖ 555 KB