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Deep-level transient spectroscopy measurements using high Schottky barriers

✍ Scribed by L. Stolt; K. Bohlin


Publisher
Elsevier Science
Year
1985
Tongue
English
Weight
471 KB
Volume
28
Category
Article
ISSN
0038-1101

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Iron diffusivity measurement with deep-l
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Abstrael ## Time dependence of iron interstitial concentration changes in p-type silicon wa]ers was measured with deep-level transient spectroscopy. A slab diffitsion model was applied to the iron-to-FeB trans-,[ormation in order to cah'ulate the room lemperamre diffhsion coefficient of iron. It wa