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Decomposition of hexafluoroacetylacetonate Cu(I) vinyltrimethylsilane on, and diffusion of Cu into single crystal and polycrystalline titanium nitride

✍ Scribed by K.V. Guinn; V.M. Donnelly; M.E. Gross; F.A. Baiocchi; I. Petrov; J.E. Greene

Book ID: 104199055
Publisher: Elsevier Science
Year: 1993
Weight: 149 KB
Volume: 295
Category: Article
ISSN: 0167-2584
DOI: 10.1016/0167-2584(93)91033-k

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