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Decomposition and Uniformity of Material Gases in GaN MOVPE

✍ Scribed by Hirako, A. ;Ohkawa, K.

Publisher: John Wiley and Sons
Year: 2002
Tongue: English
Weight: 296 KB
Volume: 194
Category: Article
ISSN: 0031-8965
DOI: 10.1002/1521-396x(200212)194:2<489::aid-pssa489>3.0.co;2-k

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