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Damping of the Growth of Titanium Oxide Nanolayer Formed by Molecular Layer Deposition Technique on Oxidized Silicon Surface

✍ Scribed by V. P. Dorofeev; A. A. Malygin; S. I. Kol'tsov

Book ID: 111607296
Publisher: SP MAIK Nauka/Interperiodica
Year: 2004
Tongue: English
Weight: 55 KB
Volume: 77
Category: Article
ISSN: 1070-4272
DOI: 10.1023/b:rjac.0000044148.15001.48

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