✦ LIBER ✦
Calculation of growth per cycle (GPC) of atomic layer deposited aluminium oxide nanolayers and dependence of GPC on surface OH concentration
✍ Scribed by PHILIP, ANU; THOMAS, SUBIN; KUMAR, K RAJEEV
- Book ID
- 125377775
- Publisher
- Springer-Verlag
- Year
- 2014
- Tongue
- English
- Weight
- 226 KB
- Volume
- 82
- Category
- Article
- ISSN
- 0304-4289
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