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Damping of a micro-resonator torsion mirror in rarefied gas ambient

✍ Scribed by Minikes, Adi; Bucher, Izhak; Avivi, Gal

Book ID: 120919409
Publisher: Institute of Physics
Year: 2005
Tongue: English
Weight: 362 KB
Volume: 15
Category: Article
ISSN: 0960-1317
DOI: 10.1088/0960-1317/15/9/019

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