AIP Conference Proceedings [AIP 28TH INTERNATIONAL SYMPOSIUM ON RAREFIED GAS DYNAMICS 2012 - Zaragoza, Spain (9–13 July 2012)] - A kinetic approach for the evaluation of damping in micro-electro-mechanical systems devices vibrating at high frequencies

✍ Scribed by Lorenzani, Silvia; Desvillettes, Laurent

• Book ID: 118175239
• Publisher: AIP
• Year: 2012
• Weight: 926 KB
• Category: Article
• DOI: 10.1063/1.4769624