𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Damage production in hydrogen-implanted silicon

✍ Scribed by J. Lahtinen; A. Vehanen; E. Punkka; P. Hautojärvi; J. Keinonen; M. Hautala; E. Rauhala; V. Karttunen; A. Kuronen; J. Räisänen

Publisher
John Wiley and Sons
Year
1988
Tongue
English
Weight
223 KB
Volume
12
Category
Article
ISSN
0142-2421

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Implanted dopant and associated damage p
Implanted dopant and associated damage profile in MeV 166Er+ implanted silicon
✍ Yuguo Li; Chunyu Tan; Jingping Zhang; Chengshan Xue; Honglei Xu; Pijun Liu; Lei 📂 Article 📅 2000 🏛 Elsevier Science 🌐 English ⚖ 129 KB

## q Ž . The dopant and associated damage profiles in 2 MeV Er ion-implanted 100 Si were investigated using Rutherford Ž . backscattering spectroscopy and channelling RBSrC technology. A convolution program was used to extract the concentration distributions of Er from the measured RBS spectra. Wh