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Characterization of neon implantation damage in silicon

✍ Scribed by E. Oliviero; S. Peripolli; P.F.P. Fichtner; L. Amaral


Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
350 KB
Volume
112
Category
Article
ISSN
0921-5107

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Characterization of neon cavity in silic
✍ S. Peripolli; E. Oliviero; P.F.P. Fichtner; M.A.Z. Vasconcellos; L. Amaral πŸ“‚ Article πŸ“… 2006 πŸ› Elsevier Science 🌐 English βš– 189 KB