✦ LIBER ✦

Damage depth profiles for high energy ion implanted silicon

✍ Scribed by Tohru Hara; Takeshi Muraki; Masataka Sakurai; Satoru Takeda; Inoue Morio; Fuji Shinji

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Damage Profiles in Ion Implanted Silicon

✍ Tkachev, V. D. ;Hölzer, G. ;Chelyadinskii, A. R. 📂 Article 📅 1984 🏛 John Wiley and Sons 🌐 English ⚖ 185 KB

Damage profile on high energy ion implan

✍ Ascheron, C. ;Otto, G. ;Flagmeyer, R. ;Zschau, H.-E. ;Bugrov, V. N. ;Karamyan, S 📂 Article 📅 1986 🏛 John Wiley and Sons 🌐 English ⚖ 207 KB

Depth profiles of cluster-ion-implanted

✍ Jenq-Horng Liang; Shiaw-Lung Chiang; Chin-Tsai Chen; Huan Niu; Mao-Sheng Tseng 📂 Article 📅 2002 🏛 Elsevier Science 🌐 English ⚖ 164 KB

Non-destructive depth profiling of silic

✍ S. Lynch; M. Murtagh; G.M. Crean; P.V. Kelly; M. O'Connor; C. Jeynes 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 346 KB

High energy Li implanted profiles in sil

✍ M. Behar; M. Weiser; S. Kalbitzer; D. Fink; P.L. Grande 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 355 KB

Determination by Raman scattering of the

✍ R. Arès; Y.B. Trudeau; J.L. Brebner; G.E. Kajrys; M. Jouanne 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 478 KB