𝔖 Bobbio Scriptorium

✦ LIBER ✦

Cycle time analysis for wafer revisiting process in scheduling of single-arm cluster tools

✍ Scribed by Yu-Xi Sun; Nai-Qi Wu

Book ID: 107435908
Publisher: Institute of Automation, Chinese Academy of Sciences
Year: 2011
Tongue: English
Weight: 357 KB
Volume: 8
Category: Article
ISSN: 1476-8186
DOI: 10.1007/s11633-011-0601-5

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Cycle time analysis of dual-arm cluster

Cycle time analysis of dual-arm cluster tools for wafer fabrication processes with multiple wafer revisiting times

✍ Qiao, Yan; Wu, NaiQi; Zhu, QingHua; Bai, LiPing 📂 Article 📅 2015 🏛 Elsevier Science 🌐 English ⚖ 656 KB

Petri Net Modeling and Wafer Sojourn Tim

Petri Net Modeling and Wafer Sojourn Time Analysis of Single-Arm Cluster Tools With Residency Time Constraints and Activity Time Variation

✍ Qiao, Y.; Wu, N.; Zhou, M. 📂 Article 📅 2012 🏛 IEEE 🌐 English ⚖ 863 KB

[IEEE 2009 IEEE International Conference

[IEEE 2009 IEEE International Conference on Automation Science and Engineering (CASE 2009) - Bangalore, India (2009.08.22-2009.08.25)] 2009 IEEE International Conference on Automation Science and Engineering - A novel approach to scheduling of single-arm cluster tools with wafer revisiting

✍ Wu, NaiQi; Chu, Feng; Chu, Chengbin; Zhou, MengChu 📂 Article 📅 2009 🏛 IEEE ⚖ 416 KB