𝔖 Bobbio Scriptorium

✦ LIBER ✦

[IEEE 2009 IEEE International Conference on Automation Science and Engineering (CASE 2009) - Bangalore, India (2009.08.22-2009.08.25)] 2009 IEEE International Conference on Automation Science and Engineering - A novel approach to scheduling of single-arm cluster tools with wafer revisiting

✍ Scribed by Wu, NaiQi; Chu, Feng; Chu, Chengbin; Zhou, MengChu

Book ID: 118051905
Publisher: IEEE
Year: 2009
Weight: 416 KB
Volume: 0
Category: Article
ISBN: 1424445787
DOI: 10.1109/coase.2009.5234146

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