Petri Net Modeling and Wafer Sojourn Time Analysis of Single-Arm Cluster Tools With Residency Time Constraints and Activity Time Variation

✍ Scribed by Qiao, Y.; Wu, N.; Zhou, M.

• Book ID: 119820854
• Publisher: IEEE
• Year: 2012
• Tongue: English
• Weight: 863 KB
• Volume: 25
• Category: Article
• ISSN: 0894-6507
• DOI: 10.1109/tsm.2012.2199338