Try and error-based scheduling algorithm for cluster tools of wafer fabrications with residency time constraints

✍ Scribed by Bing-hai Zhou; Xin Li

• Book ID: 107507805
• Publisher: Central South University
• Year: 2012
• Tongue: English
• Weight: 484 KB
• Volume: 19
• Category: Article
• ISSN: 2095-2899
• DOI: 10.1007/s11771-012-0990-9