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CW-diode laser crystallization of sputtered amorphous silicon on glass, SiNx, and SiO2intermediate layers

✍ Scribed by G. Schmidl, G. Andrä, J. Bergmann, A. Gawlik, I. Höger…

Book ID: 120676975
Publisher: Springer
Year: 2013
Tongue: English
Weight: 773 KB
Volume: 48
Category: Article
ISSN: 0022-2461
DOI: 10.1007/s10853-013-7230-z

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