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Currents through thin films of aluminum nitride

✍ Scribed by G. Lewicki; C.A. Mead


Publisher
Elsevier Science
Year
1968
Tongue
English
Weight
981 KB
Volume
29
Category
Article
ISSN
0022-3697

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Preparation of Oriented Aluminum Nitride
✍ M. Akiyama; Y. Morofuji; T. Kamohara; K. Nishikubo; Y. Ooishi; M. Tsubai; O. Fuk πŸ“‚ Article πŸ“… 2007 πŸ› John Wiley and Sons 🌐 English βš– 469 KB πŸ‘ 2 views

## Abstract __c__‐Axis oriented aluminum nitride (AlN) thin films are successfully prepared on amorphous polyimide films by radiofrequency magnetron reactive sputtering at room temperature. Structural analysis shows that the AlN films have a wurtzite structure and consist of __c__‐axis oriented col