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Current status of silicon carbide based high-temperature gas sensors

✍ Scribed by Lloyd, A.; Tobias, P.; Baranzahi, A.; Martensson, P.; Lundstrom, I.


Book ID
114537587
Publisher
IEEE
Year
1999
Tongue
English
Weight
142 KB
Volume
46
Category
Article
ISSN
0018-9383

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📜 SIMILAR VOLUMES


Gas sensors for high temperature operati
✍ A. Arbab; A. Spetz; I. Lundström 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 441 KB

Catalytic metal gate-silicon dioxide-silicon carbide (MOSiC) capacitors operating to about 800 "C are used as high temperature gas sensor devices. Hydrogen or hydrogen containing molecules, which are dissociated on the catalytic metal surface, create a decrease of the flat band voltage of the MOS ca