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Evaluation of gas mixtures with high-temperature gas sensors based on silicon carbide

✍ Scribed by A. Arbab; A. Spetz; I. Lundström

Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
379 KB
Volume
19
Category
Article
ISSN
0925-4005

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📜 SIMILAR VOLUMES

Gas sensors for high temperature operati
Gas sensors for high temperature operation based on metal oxide silicon carbide (MOSiC) devices
✍ A. Arbab; A. Spetz; I. Lundström 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 441 KB

Catalytic metal gate-silicon dioxide-silicon carbide (MOSiC) capacitors operating to about 800 "C are used as high temperature gas sensor devices. Hydrogen or hydrogen containing molecules, which are dissociated on the catalytic metal surface, create a decrease of the flat band voltage of the MOS ca