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Curing of polyimide and the effect of the TEOS SiO2barrier layer on the electromigration of sputtered Cu with polyimide passivation

✍ Scribed by Hanyi Hung; Bi-Shiou Chiou

Book ID: 107452831
Publisher: Springer US
Year: 2002
Tongue: English
Weight: 176 KB
Volume: 31
Category: Article
ISSN: 0361-5235
DOI: 10.1007/s11664-002-0177-5

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