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Cs+Ion Beam Damage of Poly(vinyl chloride) and Poly(methyl methacrylate) Studied by High Mass Resolution ToF-SIMS

✍ Scribed by Briggs, D.; Fletcher, I. W.

Publisher: John Wiley and Sons
Year: 1997
Tongue: English
Weight: 652 KB
Volume: 25
Category: Article
ISSN: 0142-2421
DOI: 10.1002/(sici)1096-9918(199703)25:3<167::aid-sia220>3.0.co;2-j

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✦ Synopsis

Changes in the SIMS spectra of poly(vinyl chloride) (PVC) and poly(methyl methacrylate) (PMMA) as a function of 8 keV Cs`dose have been studied in the range 1011-5 Â 1013 ions cm~2. In order to resolve uncertainties in previous studies (based on quadrupole SIMS and insulating samples) this work has utilized a high mass resolution ToF-SIMS instrument and Ðlms on silicon sufficiently thin to obviate the need for surface potential control (charge neutralization). The form of the damage curves has been compared with a recently introduced model of damage development based on the statistics of bond breaking.

1997 by John

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