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Crystallographic defects in thermally oxidized wafer bonded silicon on insulator (SOI) substrates

✍ Scribed by Luis Felipe Giles; Yasuo Kunii

Book ID: 107458037
Publisher: Springer US
Year: 1999
Tongue: English
Weight: 640 KB
Volume: 28
Category: Article
ISSN: 0361-5235
DOI: 10.1007/s11664-999-0236-2

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