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Crystal quality improvement of solid-phase crystallized evaporated silicon films by in-situ densification anneal

✍ Scribed by Song He; Bram Hoex; Daniel Inns; Ian C. Brazil; Per I. Widenborg; Armin G. Aberle

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

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Excimer laser and rapid thermal annealin

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Low-temperature growth of polycrystallin

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Extraction of trap densities in entire b

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