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CrSi resistive films produced by magnetron-plasmatron sputtering

✍ Scribed by S. Schiller; U. Heisig; K. Steinfelder; Chr. Korndoerfer


Book ID
118367479
Publisher
Elsevier Science
Year
1982
Tongue
English
Weight
311 KB
Volume
96
Category
Article
ISSN
0040-6090

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