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Creation of Si nanocrystals from SiO2/Si by He and H ion implantation

✍ Scribed by X.D. Zhang; C.L. Liu; M.K. Li; Y.J. Gao; D.C. Zhang

Book ID: 113823835
Publisher: Elsevier Science
Year: 2012
Tongue: English
Weight: 848 KB
Volume: 276
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2012.01.025

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