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Creation of interface defects in thermal Si/ through annealing

✍ Scribed by Stesmans, A; Afanas'ev, V V

Book ID: 120247457
Publisher: Institute of Physics
Year: 1996
Tongue: English
Weight: 84 KB
Volume: 8
Category: Article
ISSN: 0953-8984
DOI: 10.1088/0953-8984/8/36/002

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