𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Cost efficient master fabrication process on copper substrates

✍ Scribed by Simone Luigi Marasso; Giancarlo Canavese; Matteo Cocuzza

Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
615 KB
Volume
88
Category
Article
ISSN
0167-9317

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

Fabrication of fine copper lines by sele
Fabrication of fine copper lines by selective chemical vapor deposition on silicon substrates
✍ S. Vidal; A. Gleizes; D. Davazoglou πŸ“‚ Article πŸ“… 2001 πŸ› Elsevier Science 🌐 English βš– 771 KB

Fine copper lines, with a width of less than 1 mm, were fabricated on silicon substrates. For the fabrication, oxidized (100) silicon substrates were used, covered with a film grown by LPCVD at 0.1 Torr and 5508C from W(CO) decomposition. 6 These substrates were subsequently covered with AZ 5214E ph