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Correlation of local structure and electrical activation in arsenic ultrashallow junctions in silicon

✍ Scribed by Giubertoni, Damiano; Pepponi, Giancarlo; Gennaro, Salvatore; Bersani, Massimo; Sahiner, Mehmet Alper; Kelty, Stephen P.; Doherty, Roisin; Foad, Majeed A.; Kah, Max; Kirkby, Karen J.; Woicik, Joseph C.; Pianetta, Piero

Book ID: 111950582
Publisher: American Institute of Physics
Year: 2008
Tongue: English
Weight: 668 KB
Volume: 104
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.3026706

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