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Direct observation of local atomic structure in arsenic implanted silicon

✍ Scribed by Yamazaki, H.; Yoshiki, M.; Takaishi, R.; Takeno, S.

Book ID: 119330755
Publisher: Elsevier Science
Year: 2012
Tongue: English
Weight: 467 KB
Volume: 15
Category: Article
ISSN: 1369-8001
DOI: 10.1016/j.mssp.2012.04.010

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