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Diffusion and electrical activation of indium in silicon

✍ Scribed by Scalese, S.; Italia, M.; La Magna, A.; Mannino, G.; Privitera, V.; Bersani, M.; Giubertoni, D.; Barozzi, M.; Solmi, S.; Pichler, P.

Book ID: 120013445
Publisher: American Institute of Physics
Year: 2003
Tongue: English
Weight: 863 KB
Volume: 93
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.1572547

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