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Diffusion of Indium Implanted in Silicon Oxides

✍ Scribed by Chang, Ruey-Dar; Ling, Yu-Ting; Liu, Taylor; Tsai, Jung-Ruey; Ma, Chia-Chi

Book ID: 119951219
Publisher: Institute of Pure and Applied Physics
Year: 2009
Tongue: English
Weight: 245 KB
Volume: 48
Category: Article
ISSN: 0021-4922
DOI: 10.1143/JJAP.48.056501

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