Correlation between optical characterization of the plasma in reactive magnetron sputtering deposition of Zr–N on SS 316L and surface and mechanical properties of the deposited films

✍ Scribed by A. Fragiel; R. Machorro; J. Muñoz-Saldaña; J. Salinas; L. Cota

• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 843 KB
• Volume: 254
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2008.01.104