๐”– Bobbio Scriptorium
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Correction of secondary ion mass spectrometry profiles for atom diffusion measurements

โœ Scribed by A. Portavoce; N. Rodriguez; R. Daineche; C. Grosjean; C. Girardeaux


Book ID
113792611
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
365 KB
Volume
63
Category
Article
ISSN
0167-577X

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Depth profile measurement by secondary i
โœ M. Moens; M. van Craen; F.C. Adams ๐Ÿ“‚ Article ๐Ÿ“… 1984 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 1022 KB

The possibilities of measuring depth profiles by secondary ion mass spectrometry are evaluated. The influence of different instrumental and experimental parameters on depth resolution in the profiles are studied: the effects of primary ion beam characteristics, reactive gas adsorption and mechanical