✦ LIBER ✦

Copper precipitation in large-diameter Czochralski silicon

✍ Scribed by Xi, Zhenqiang; Chen, Jun; Yang, Deren; Lawerenz, A.; Moeller, H. J.

Book ID: 120229668
Publisher: American Institute of Physics
Year: 2005
Tongue: English
Weight: 573 KB
Volume: 97
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.1875740

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Nickel precipitation in large-diameter C

Nickel precipitation in large-diameter Czochralski silicon

✍ Zhenqiang Xi; Deren Yang; Jun Chen; Duanlin Que; H.J. Moeller 📂 Article 📅 2004 🏛 Elsevier Science 🌐 English ⚖ 252 KB

Influence of copper precipitation on oxy

Influence of copper precipitation on oxygen precipitation in Czochralski silicon

✍ Xi, Zhenqiang; Yang, Deren; Chen, Jun; Xu, Jin; Ji, Yujie; Que, Duanlin; Moeller 📂 Article 📅 2003 🏛 Institute of Physics 🌐 English ⚖ 220 KB

Effect of vacancies on copper precipitat

Effect of vacancies on copper precipitation in n-type Czochralski silicon

✍ Wang, Weiyan ;Yang, Deren ;Ma, Xiangyang ;Que, Duanlin 📂 Article 📅 2008 🏛 John Wiley and Sons 🌐 English ⚖ 424 KB

## Abstract The effect of vacancies induced by the prior rapid thermal processing (RTP) at 900–1200 °C in Ar on copper (Cu) precipitation in n‐type silicon has been investigated by means of optical microscopy and transmission electron microscopy. It was revealed that in the sample without the prior

The Science and Engineering of Large- Di

The Science and Engineering of Large- Diameter Czochralski Silicon Crystal Growth

✍ Lin, W; Benson, K E 📂 Article 📅 1987 🏛 Annual Reviews 🌐 English ⚖ 676 KB

Nucleation temperature of large oxide pr

Nucleation temperature of large oxide precipitates in as-grown Czochralski silicon crystal

✍ K. Wada; H. Nakanishi; H. Takaoka; N. Inoue 📂 Article 📅 1982 🏛 Elsevier Science 🌐 English ⚖ 535 KB

Oxygen diffusion and precipitation in Cz

Oxygen diffusion and precipitation in Czochralski silicon

✍ Newman, R C 📂 Article 📅 2000 🏛 Institute of Physics 🌐 English ⚖ 291 KB