✦ LIBER ✦

The Science and Engineering of Large- Diameter Czochralski Silicon Crystal Growth

✍ Scribed by Lin, W; Benson, K E

Book ID: 121350146
Publisher: Annual Reviews
Year: 1987
Tongue: English
Weight: 676 KB
Volume: 17
Category: Article
ISSN: 0084-6600
DOI: 10.1146/annurev.ms.17.080187.001421

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