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Copolymer electron resists: poly(stryene-methyl methacrylate) copolymers

✍ Scribed by Varinder K Sharma; Stanley Affrossman; Richard A Pethrick

Publisher: Elsevier Science
Year: 1983
Tongue: English
Weight: 358 KB
Volume: 24
Category: Article
ISSN: 0032-3861
DOI: 10.1016/0032-3861(83)90022-8

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