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Synthesis and evaluation of methyl methacrylate copolymers and terpolymers as electron-beam resists. I. Poly(methyl methacrylate–methacrylic acid–methacryloyl chloride)

✍ Scribed by Ivan Gitsov; Nikolina A. Madjarova

Publisher
John Wiley and Sons
Year
1990
Tongue
English
Weight
317 KB
Volume
41
Category
Article
ISSN
0021-8995

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