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Convertibility of conductivity type in reactively sputtered ZnO thin films

✍ Scribed by Tüzemen, S. ;Doğan, Seydi ;Ateş, Aytunç ;Yįldįrįm, M. ;Xiong, Gang ;Wilkinson, John ;Williams, R. T.

Publisher
John Wiley and Sons
Year
2003
Tongue
English
Weight
120 KB
Volume
195
Category
Article
ISSN
0031-8965

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Al and N codoped ZnO thin films were grown on n-Si (100) substrate by sputtering technique. Hall effect measurements of as-grown films exhibited n-type conduction, however 500 °C Ar annealed codoped films showed p-type conductivity with a hole concentration of 9.9 × 10 16 cm -3 , resistivity of 15.9