𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Conventional and ionized magnetron sputter‐deposition of nanocrystalline titanium diboride thin films

✍ Scribed by Mei‐Ling Wu; Xi‐Wei Lin; Vinayak P. Dravid; Yip‐Wah Chung; Ming‐Show Wong; William D. Sproul

Book ID
110385813
Publisher
Springer US
Year
1998
Tongue
English
Weight
574 KB
Volume
5
Category
Article
ISSN
1023-8883

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Structural evolution and electrochemical
Structural evolution and electrochemical performance of LiFePO4/C thin films deposited by ionized magnetron sputtering
✍ K.-F. Chiu; P.Y. Chen 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 840 KB

Thin films of carbon mixed LiFePO 4 were prepared by ionized magnetron sputter deposition (IMSD) and post anneal. The IMSD technique uses a built-in radio frequency coil to generate an inductively coupled plasma (ICP) confined close to the substrate. Therefore, the films were deposited under concurr