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Controlling parameters of focused ion beam (FIB) on high aspect ratio micro holes milling

✍ Scribed by Jamaludin, Fatin Syazana; Mohd Sabri, Mohd Faizul; Said, Suhana Mohd

Book ID: 121468148
Publisher: Springer-Verlag
Year: 2013
Tongue: English
Weight: 850 KB
Volume: 19
Category: Article
ISSN: 0946-7076
DOI: 10.1007/s00542-013-1912-y

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