✦ LIBER ✦

Controlled Growth of Non-Uniform Arsenic Profiles in Silicon Reduced-Pressure Chemical Vapor Deposition Epitaxial Layers

✍ Scribed by M. Popadić; T. L. M. Scholtes; W. de Boer; F. Sarubbi; L. K. Nanver

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Incorporation of boron in SiGe(C) epitax

✍ J. Hållstedt; A. Parent; M. Östling; H.H. Radamson 📂 Article 📅 2005 🏛 Elsevier Science 🌐 English ⚖ 262 KB

Heavy atomic-layer doping of B in low-te

✍ Hiroki Tanno; Masao Sakuraba; Bernd Tillack; Junichi Murota 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 448 KB